i. Photolithography, Microscopy, Spectroscopy Systems;
ii. Nanotechnology, Semiconductor Manufacturing;
iii. X-ray and High Energy Radiation Application;
1. Micro/Nano Fabrication & Thin Films
Nanotechnology, Nanoelectronics, Semiconductor devices, Microfabrication process;
2. Nano Materials & Applications
2.1. Optical coating and advanced materials [X-ray, EUV/DUV, Infrared]
2.2. Optoelectronic materials [Solid-state, Bandgap, Coefficient]
2.3. Bioelectronic materials [Lab-on-Chip, Organ-on-Chip, Drug delivery]
2.4. Micro/Nano particles [Electrostatic/Magnetostatic forces]
2.5. Optical metrology techniques [SEM, TEM, EDX, XPS, XRD, AFM, Raman]
3. Mechatronics & Instrumentation
Automation systems, Sensors and actuators, Lasers, High vacuum systems, System engineering;